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Molybdenum Disulfide (MoS2) Nanomechanical Resonators Integrated on Microchannels

Datetime:2016/7/25 22:45:55hit:10500

Molybdenum Disulfide (MoS2) Nanomechanical Resonators Integrated on Microchannels.We report on experimental demonstration of multilayer molybdenum disulfide (MoS) nanomechanical resonators integrated on microchannels, with the potential for resonant operation and sensing applications in microfluidics. Microchannels with width of 655m and depth of 651C2m are fabricated on polydimethylsiloxane (PDMS) substrate. We transfer MoSflakes with both singly-clamped cantilever and doubly-clamped membrane structure onto the PDMS channels, and measure both undriven thermomechanical resonances and optically driven responses from the devices. The devices show up to 6 thermomechanical resonances, with highest resonance frequency () of 16.3MHz and quality () factor 65200. This type of MoSnanomechanical resonators, when integrated with microfluidics in microchannels, would make new interesting candidates for biosensing and chemical sensing in fluids