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Molybdenum disulfide dc contact MEMS shunt switch

Datetime:2016/7/18 22:04:11hit:10500

Molybdenum disulfide dc contact MEMS shunt switch.Atomic force microscopy pulsed force mode verifies that molybdenum disulfide (MoS) has a smaller surface adhesion energy than graphene. MEMS switches based on MoSmay have less stiction problems. Suspended MoStwo-end fixed beams were fabricated, and their mechanical properties including Young's modulus were characterized by atomic force microscope (AFM) indentation. MoSdc contact MEMS (micro-electro-mechanical systems) switches were demonstrated with a pull-in voltage of less than 10 V.